Lsms-160 Magnetron Sputtering Coating Machine

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Customization: Available
After-sales Service: 24 Months
Warranty: 24 Months
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  • Lsms-160 Magnetron Sputtering Coating Machine
  • Lsms-160 Magnetron Sputtering Coating Machine
  • Lsms-160 Magnetron Sputtering Coating Machine
  • Lsms-160 Magnetron Sputtering Coating Machine
  • Lsms-160 Magnetron Sputtering Coating Machine
  • Lsms-160 Magnetron Sputtering Coating Machine
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Basic Info.

Model NO.
LSMS-160
Wafer Size
≤6 Inches
Transport Package
Carton
Specification
170*130*180
Trademark
CHHGC
Origin
China
Production Capacity
5000 Pieces/Year

Packaging & Delivery

Package Size
17.00cm * 13.00cm * 18.00cm
Package Gross Weight
10.000kg

Product Description

Lsms-160 Magnetron Sputtering Coating MachineLsms-160 Magnetron Sputtering Coating MachineLsms-160 Magnetron Sputtering Coating MachineLsms-160 Magnetron Sputtering Coating MachineLsms-160 Magnetron Sputtering Coating MachineLsms-160 Magnetron Sputtering Coating MachinePRODUCT INTRODUCTION
Purpose: Using sputtering method to
deposit a few microns of thin film on the
surface of the sample, including various
metals, semiconductors, ferromagnetic
materials, as well as insulating oxides,
ceramics and other materials.
PRODUCT PARAMETER
Wafer size
≤6 inches
Vacuum degree
10 -8 Torr
Thickness uniformity error
<5%
Sputtering thickness
0-300 nm
Sputtering material
Al, Cu, Gr, Co, Fe, Ni, Pt, Ag, TiO2, NiFe and NiMn,etc
Size
170 cm*130 cm*180 cm

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