Lsms-160 Magnetron Sputtering Coating Machine

• After-sales Service: 24 Months
• Warranty: 24 Months
• Wafer Size: ≤6 Inches
• Shipping Cost: Estimated freight per unit.: about shipping cost and estimated delivery time.
• Currency: US$
• Return&refunds: You can apply for a refund up to 30 days after receipt of the products.
• Model NO.: LSMS-160
• Transport Package: Carton
• Specification: 170*130*180
• Trademark: CHHGC
• Origin: China
• Production Capacity: 5000 Pieces/Year
• Package Size: 17.00cm * 13.00cm * 18.00cm
• Package Gross Weight: 10.000kg

Product Description

PRODUCT INTRODUCTION

Purpose: Using sputtering method to

deposit a few microns of thin film on the

surface of the sample, including various

metals, semiconductors, ferromagnetic

materials, as well as insulating oxides,

ceramics and other materials.
PRODUCT PARAMETER

Wafer size

≤6 inches

Vacuum degree

10 -8 Torr

Thickness uniformity error

<5%

Sputtering thickness

0-300 nm

Sputtering material

Al, Cu, Gr, Co, Fe, Ni, Pt, Ag, TiO2, NiFe and NiMn,etc

Size

170 cm*130 cm*180 cm