such as conductor films and metal plates.
PRODUCT PARAMETER
Material range
Conductor film, metal sheet and other conductor samples
Measurement mode
Precise positioning scan
Maximum scanning area size
300 mm* 300 mm
Positioning accuracy
5μm
Detect minimum line width or spacing
0.5 mm
Detection maximum depth
30 mm
Size
85 cm*55 cm*30 cm
Image analysis description
Surface defect measurements were made for grooves of aluminum plate samples with different
depths (i.e., defects), as shown below. The defects from left to right are: (a) surface grooves with
a depth of 1mm; (b) Surface grooves with a depth of 3mm; (c) is an internal groove with a
thickness of 4mm from the surface; (d) is an internal groove with a thickness of 1mm from the
surface; (e) is a through-hole slot; The width of each hole and slot is 10mm. Aluminum has an
electrical conductivity of 3.78X10 7 (S.m-1 ) and a permeability of 1.2566X10 -6 (H.m-1 ).
LabVIEW program was used to control the automatic scanning system to scan the surface of the
sample in accordance with the red snake path set in the figure, and set the Z-axis step distance
of 1.25mm each time (you can set the specific value according to the situation), the scanning
area of 70×118mm, the total number of calculated measuring points is 56×94 5264 points. In
order to consider the influence of skin effect and better obtain the surface topography of the
sample, the detection conditions at different frequencies of 200, 500, 1500 and 5000Hz were
tested respectively. The defect location was determined by high frequency first, and then the
specific size and depth of the defect was further obtained by adjusting to low frequency. Finally,
the surface and near-surface morphologies of the samples were obtained.
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