New Lsms-160 Magnetron Sputtering Coating Machine

• Customization: Available
• After-sales Service: 24 Months
• Warranty: 24 Months
• Model NO.: LSMS 160
• Transport Package: Carton
• Specification: 170*130*180
• Trademark: CHHGC
• Origin: China
• Production Capacity: 5000 Pieces/Year

Product Description

PRODUCT INTRODUCTION

Purpose: Using sputtering method to

deposit a few microns of thin film on the

surface of the sample, including various

metals, semiconductors, ferromagnetic

materials, as well as insulating oxides,

ceramics and other materials.
PRODUCT PARAMETER

Wafer size

≤6 inches

Vacuum degree

10 -8 Torr

Thickness uniformity error

<5%

Sputtering thickness

0-300 nm

Sputtering material

Al, Cu, Gr, Co, Fe, Ni, Pt, Ag, TiO2, NiFe and NiMn,etc

Size

170 cm*130 cm*180 cm