Customization: | Available |
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After-sales Service: | Factory Supply Service |
Warranty: | Three Years |
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Project | content |
Chip size | Four inches,six inches,eight inches |
Exposure light source | 365nm,380nm,395nm Three wavelength LED integrated ight source |
Resolving power | 3μm |
Alignment accuracy | 300 nm |
Scale Multiplier | 1:5 |
Exposure mode | Contact exposure |
Feature size uniformity | ±10% |
Size | 170 cm*130 cm*180 cm |